Silicon Nitride for Microelectronic Applications

Part 2 Applications and Devices

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July 7, 2019 | History

Silicon Nitride for Microelectronic Applications

Part 2 Applications and Devices

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Publish Date
Publisher
Springer US
Language
English
Pages
117

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Edition Availability
Cover of: Silicon Nitride for Microelectronic Applications
Silicon Nitride for Microelectronic Applications: Part 2 Applications and Devices
1972, Springer US
electronic resource : in English

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Book Details


Edition Notes

Online full text is restricted to subscribers.

Also available in print.

Mode of access: World Wide Web.

Published in
Boston, MA

Classifications

Dewey Decimal Class
621.3
Library of Congress
TK1-9971, TA1750-1750.22TK1-99, TA401-492

The Physical Object

Format
[electronic resource] :
Pagination
1 online resource (vii, 117 p.)
Number of pages
117

Edition Identifiers

Open Library
OL27087610M
ISBN 10
1461596114, 1461596092
ISBN 13
9781461596110, 9781461596097
OCLC/WorldCat
851825594

Work Identifiers

Work ID
OL19902136W

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