Advances in resist technology and processing VII

5-6 March 1990, San Jose, California

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Last edited by MARC Bot
July 31, 2019 | History

Advances in resist technology and processing VII

5-6 March 1990, San Jose, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
595

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Edition Availability
Cover of: Advances in Resist Technology and Processing VII
Advances in Resist Technology and Processing VII
December 1990, Society of Photo Optical
Paperback in English
Cover of: Advances in resist technology and processing VII
Cover of: Advances in resist technology and processing VII

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Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series -- v. 1262., Proceedings of SPIE--the International Society for Optical Engineering -- v. 1262.
Genre
Congresses.

The Physical Object

Pagination
viii, 595 p. :
Number of pages
595

ID Numbers

Open Library
OL19567347M
ISBN 10
0819403091
ISBN 13
9780819403094
LCCN
90060892
OCLC/WorldCat
22188466

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL9620566W
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 25, 2009 Edited by ImportBot add OCLC number
October 22, 2008 Created by ImportBot Imported from Oregon Libraries MARC record