An edition of Sub-half-micron lithography for ULSIs (2000)

Sub-half-micron lithography for ULSIs

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Cover of: Sub-half-micron lithography for ULSIs by edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai
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Last edited by ImportBot
December 3, 2022 | History
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An edition of Sub-half-micron lithography for ULSIs (2000)

Sub-half-micron lithography for ULSIs

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Cambridge University Press
Language
English
Pages
323

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Previews available in: English

Subjects
Integrated circuits, Ultra large scale integration, Microlithography, Printed circuits, Design and construction

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Edition Availability
Cover of: Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor Physics & Microelectronic Engineering)
Sub-Half-Micron Lithography for ULSIs (Cambridge Studies in Semiconductor Physics & Microelectronic Engineering)
June 26, 2000, Cambridge University Press
Hardcover in English
Libraries near you: WorldCat
Cover of: Sub-half-micron lithography for ULSIs
Sub-half-micron lithography for ULSIs
2000, Cambridge University Press
in English
Libraries near you: WorldCat

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Book Details

Published in

Cambridge, New York

Edition Notes

Includes bibliographical references and index

Classifications

Library of Congress
TK7874.76 .S83 2000

The Physical Object

Pagination
xvii, 323 p. :
Number of pages
323

ID Numbers

Open Library
OL18111053M
Internet Archive
subhalfmicronlit0000unse
ISBN 10
0521570808
LCCN
99013558
Goodreads
1106667

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 3, 2022 Edited by ImportBot import existing book
November 30, 2020 Edited by MARC Bot import existing book
August 23, 2020 Edited by ImportBot import existing book
July 6, 2020 Edited by Michel T. Talbot Added new cover
October 10, 2008 Created by ImportBot Imported from Miami University of Ohio MARC record.