An edition of MEMS/NEMS
(2006)
MEMS/NEMS
handbook techniques and applications
by Cornelius T. Leondes
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Mems/Nems: Handbook Techniques and Applications Design Methods, Fabrication Techniques, Manufacturing Methods, Sensors and Actuators, Medical Applications and MOEMS
Aug 23, 2016, Springer
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1489977392 9781489977397
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Book Details
Table of Contents
v. 1. Design methods
v. 2. Fabrication techniques
v. 3. Manufacturing methods
v. 4. Sensors and actuators
v. 5. Medical applications and MOEMS.
Edition Notes
Includes bibliographical references and index.
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History
- Created October 6, 2008
- 11 revisions
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| December 11, 2020 | Edited by MARC Bot | import existing book |
| October 8, 2020 | Edited by ImportBot | import existing book |
| August 1, 2020 | Edited by ImportBot | import existing book |
| February 17, 2019 | Edited by MARC Bot | import existing book |
| October 6, 2008 | Created by ImportBot | Imported from Library of Congress MARC record |