An edition of Oberflächentechnologie mit Niederdruckplasmen (1994)

Oberflächentechnologie mit Niederdruckplasmen

Beschichten und Strukturieren in der Mikrotechnik

2., völlig neubearbeitete Aufl.

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Oberflächentechnologie mit Niederdruckplasme ...
Franz, Gerhard Dr. rer. nat.
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Last edited by ImportBot
October 28, 2022 | History
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An edition of Oberflächentechnologie mit Niederdruckplasmen (1994)

Oberflächentechnologie mit Niederdruckplasmen

Beschichten und Strukturieren in der Mikrotechnik

2., völlig neubearbeitete Aufl.

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Springer-Verlag
Language
German
Pages
434

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Subjects
Industrial applications, Low temperature plasmas, Plasma (Ionized gases), Plasma engineering, Plasma etching

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Edition Availability
Cover of: Oberflächentechnologie mit Niederdruckplasmen
Oberflächentechnologie mit Niederdruckplasmen: Beschichten und Strukturieren in der Mikrotechnik
1994, Springer-Verlag
in German - 2., völlig neubearbeitete Aufl.
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Book Details

Published in

Berlin, New York

Edition Notes

Includes bibliographical references (p. 397-416) and index.

Classifications

Library of Congress
QC718 .F75 1994

The Physical Object

Pagination
x, 434 p. :
Number of pages
434

ID Numbers

Open Library
OL1236921M
ISBN 10
3540573607, 0387573607
LCCN
94240497

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
October 28, 2022 Edited by ImportBot import existing book
November 19, 2020 Edited by MARC Bot import existing book
December 11, 2009 Edited by WorkBot link works
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record.