Microelectromechanical systems (MEMS)

microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia

Microelectromechanical systems (MEMS)
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Microelectromechanical systems (MEMS)

microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia

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Publish Date
Language
English
Pages
460

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Book Details


Edition Notes

Includes bibliographical references and index.

Published in
New York, N.Y
Series
DSC ;, vol. 59, DSC (Series) ;, v. 59.

Classifications

Dewey Decimal Class
621
Library of Congress
TK7874 .M4674 1996, TK7874.M4674 1996

The Physical Object

Pagination
viii, 460 p. :
Number of pages
460

Edition Identifiers

Open Library
OL1020197M
ISBN 10
0791815412
LCCN
96078683
OCLC/WorldCat
36254610
Goodreads
5631030

Work Identifiers

Work ID
OL8359672W

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