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Last edited by BWBImportBot
May 14, 2020 | History
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Markku Tilli

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  • Cover of: Handbook of Silicon Based MEMS Materials and Technologies

    First published in 2009 — 5 editions
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Subjects

Electric properties, Electronic apparatus and appliances, design and construction, Materials, Matériaux, Mechanical, Micro-Electrical-Mechanical Systems, Microelectromechanical systems, Microsystèmes électromécaniques, Silicon, TECHNOLOGY & ENGINEERING

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ID Numbers

  • OLID: OL7890374A

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History

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May 14, 2020 Created by BWBImportBot import new book