Integrated Circuit Metrology, Inspection, and Process Control IV

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January 26, 2022 | History

Integrated Circuit Metrology, Inspection, and Process Control IV

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Publish Date
Pages
528

Book Details


Edition Notes

Series
Spie Proceedings, Vol 1261

Classifications

Library of Congress
TK7874 .I5428 1990, TA1501 .S65 v. 1261

The Physical Object

Format
Paperback
Number of pages
528

Edition Identifiers

Open Library
OL11392658M
Internet Archive
integratedcircui1261unse
ISBN 10
0819403083
ISBN 13
9780819403087
LCCN
90060891
OCLC/WorldCat
21961349

Work Identifiers

Work ID
OL9620564W

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