Plasma-enhanced chemical vapor deposition

1st. edition

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Last edited by Scott365Bot
October 23, 2023 | History

Plasma-enhanced chemical vapor deposition

1st. edition

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Publish Date
Pages
84

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Edition Availability
Cover of: Plasma-enhanced chemical vapor deposition
Plasma-enhanced chemical vapor deposition
1997, The Education Committee, American Vacuum Society
Paperback - 1st. edition

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Book Details


Edition Notes

Series
AVS monograph series

The Physical Object

Format
Paperback
Number of pages
84

Edition Identifiers

Open Library
OL12137490M
Internet Archive
plasmaenhancedch0000fran
ISBN 10
1563967782
ISBN 13
9781563967788
Goodreads
5856479

Work Identifiers

Work ID
OL2383357W

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