An edition of EUV kōgen no kaihatsu to ōyō (2013)

EUV kōgen no kaihatsu to ōyō

Development and application of extreme ultraviolet light source

Fukyūban

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EUV kōgen no kaihatsu to ōyō
Kōichi Toyoda
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Last edited by MARC Bot
November 14, 2020 | History
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An edition of EUV kōgen no kaihatsu to ōyō (2013)

EUV kōgen no kaihatsu to ōyō

Development and application of extreme ultraviolet light source

Fukyūban

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Shīemushī Shuppan
Language
Japanese
Pages
273

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Subjects
Extreme ultraviolet lithography, Ultraviolet radiation, Industrial applications

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Edition Availability
Cover of: EUV kōgen no kaihatsu to ōyō
EUV kōgen no kaihatsu to ōyō: Development and application of extreme ultraviolet light source
2013, Shīemushī Shuppan
in Japanese - Fukyūban
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Book Details

Edition Notes

Includes bibliographical references.

Published in
Tōkyō-to Chiyoda-ku
Series
Erekutoronikusu shirīzu
Other Titles
Development and application of extreme ultraviolet light source

Classifications

Library of Congress
TK7872.M3 E984 2013

The Physical Object

Pagination
vi, 273 pages
Number of pages
273

ID Numbers

Open Library
OL31161073M
ISBN 10
4781307094
ISBN 13
9784781307091
LCCN
2014394265

Source records

Library of Congress MARC record

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November 14, 2020 Created by MARC Bot import new book