MARC Record from University of Toronto

LEADER: 01766cam 2200325 a 4500
005 19991203093851.0
008 991022s1999 njua b 100 0 eng d
020 $a0780352173 (softbound)
020 $a0780352181 (casebound)
020 $a078035219X (microfiche)
039 $fam
050 4 $aTK7836$b.I14 1999
090 08 $aTK 7871.85 .I213 1999$bENGI$c1
111 2 $aIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop$n(10th :$d1999 :$cBoston, Mass.)
245 10 $a1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop :$bASMC 99 proceedings : September 8-10, 1999, Boston, Massachusetts, USA /$c[co-sponsored by Semiconductor Equipment and Materials International (SEMI), Institute of Electrical and Electronics Engineers, Inc. (IEEE) ... et al.].
246 30 $bASMC 99 proceedings
246 30 $aAdvanced Semiconductor Manufacturing Conference and Workshop
260 $aPiscataway, N.J. :$bIEEE ;$aMountain View, Calif. :$bSEMI,$cc1999.
300 $avi, 455 p. :$bill. ;$c28 cm.
500 $a"10 Years of Advancing the Science of Semiconductor Manufacturing Excellence."
500 $a"IEEE Catalog Number 99CH36295"--p. iii.
504 $aIncludes bibliographic references.
650 0 $aSemiconductor industry$vCongresses.
650 0 $aSemiconductors$xDesign and construction$vCongresses.
650 0 $aProcess control$vCongresses.
710 2 $aInstitute of Electrical and Electronics Engineers.
710 2 $aSemiconductor Equipment and Materials International.
740 01 $a10 years of advancing the science of semiconductor manufacturing excellence.
948 $a12/03/1999$b12/16/1999
949 $aTK7871.85 .I213 1999$wLC$c1$i31761050808591$d21/7/2000$lSTACKS$mENGI_CSCI$n1$q1$rY$sY$tBOOK$u28/12/1999