| Record ID | marc_university_of_toronto/uoft.marc:1369655370:1154 |
| Source | University of Toronto |
| Download Link | /show-records/marc_university_of_toronto/uoft.marc:1369655370:1154?format=raw |
LEADER: 01154cam 2200229 a 4500
005 19960229084833.5
008 960229s1995 au a b 101 0 eng d
020 $a3211827412
050 4 $aTS156.8$b.A123 1995
090 8 $aTS 156.8 .A123 1995$bENGI$c1
245 00 $a3-dimensional process simulation /$cJ. Lorenz (ed.)
246 3 $a3D process simulation
246 3 $aThree dimensional process simulation
260 $aWien ;$aNew York :$bSpringer-Verlag,$cc1995
300 $aviii, 196 p. :$bill. ;$c25 cm.
500 $a"This volume contains the Proceedings of the International 'Workshop on 3D Process Simulation' which was held at the Campus of the University of Erlangen-Nuremberg in Erlangen on September 5, 1995, in conjunction with the 6th International Conference on 'Simulation of Semiconductor Devices and Processes' (SISDEP '95)"--P. v.
504 $aIncludes bibliographical references and index.
650 0 $aProcess control$xComputer simulation$xCongresses.
700 1 $aLorenz, Jürgen.
948 $a02/29/1996$b07/17/1999
039 $fjw/jw(jw)
949 $aTS156.8 .A123 1995$wLC$c1$i31761042745752$lTRANSFER$mENGI_CSCI$rY$sY$tBOOK$u14/3/1996