| Record ID | marc_records_scriblio_net/part21.dat:169439152:1053 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part21.dat:169439152:1053?format=raw |
LEADER: 01053cam 2200265 a 4500
001 90223568
003 DLC
005 19990716000000.0
008 901205s1989 ja a b 101 0 eng
010 $a 90223568
020 $a4900526037
040 $aDLC$cDLC$dDLC
050 00 $aTK7874$b.I59243 1989
082 00 $a621.381$220
111 2 $aInternational Symposium on MicroProcess Conference$n(2nd :$d1989 :$cKōbe-shi, Japan)
245 10 $aMicroProcess 89 :$bproceedings of the 1989 International Symposium on MicroProcess Conference, July 2-5, 1989, Kobe, Japan /$cedited by S. Namba, T. Kitayama.
260 $aTokyo, Japan :$bPublication Office, Japanese Journal of Applied Physics,$cc1989.
300 $a385 p. :$bill. ;$c31 cm.
440 0 $aJJAP series,$x0914-9090 ;$v3
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectronics$xCongresses.
650 0 $aMicrolithography$xCongresses.
650 0 $aLasers$xIndustrial applications$xCongresses.
700 1 $aNamba, Susumu,$d1928-
700 1 $aKitayama, T.$q(Toyoki)