| Record ID | marc_records_scriblio_net/part19.dat:109735613:1267 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part19.dat:109735613:1267?format=raw |
LEADER: 01267cam 2200289 a 4500
001 87061007
003 DLC
005 20041007102001.0
008 870327s1987 waua b 101 0 eng
010 $a 87061007
020 $a089252829X (pbk.)
040 $aDLC$cDLC$dDLC
050 00 $aTK7872.T55$bM63 1987
082 00 $a621.381/7$219
245 00 $aModern optical characterization techniques for semiconductors and semiconductor devices /$cO.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
260 $aBellingham, Wash., USA :$bSPIE--the International Society for Optical Engineering,$cc1987.
300 $avi, 282 p. :$bill. ;$c28 cm.
440 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 794
500 $a"26-27 March 1987, Bay Point, Florida."
504 $aIncludes bibliographies and index.
650 0 $aThin film devices$xCongresses.
650 0 $aThin films$xOptical properties$xCongresses.
700 1 $aGlembocki, O. J.
700 1 $aPollak, Fred H.
700 1 $aSong, Jin-Joo.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aMetallurgical Society (U.S.)