| Record ID | marc_records_scriblio_net/part13.dat:5385073:914 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part13.dat:5385073:914?format=raw |
LEADER: 00914nam 2200229 a 4500
001 81051404
003 DLC
005 19820108000000.0
008 820107s1981 waua b 10100 eng
010 $a 81051404
020 $a0892523093 (pbk.)
050 0 $aTK7871.85$b.O6
082 0 $a621.3815/2/0287$219
245 00 $aOptical characterization techniques for semiconductor technology :$bApril 1-2, 1981, San Jose, California /$cD.E. Aspnes, S. So, R.F. Potter, editors.
260 0 $aBellingham, Wash. :$bSociety of Photo-optical Instrumentation Engineers,$c1981.
300 $ax, 262 p. :$bill. ;$c28 cm.
440 0 $aProceedings of the Society of Photo-optical Instrumentation Engineers ;$vv. 276
504 $aIncludes bibliographical references and indexes.
650 0 $aSemiconductors$xTesting$xOptical methods$xCongresses.
700 10 $aAspnes, D. E.
700 10 $aSo, S.$q(Samuel S.)
700 10 $aPotter, Roy F.