| Record ID | marc_records_scriblio_net/part12.dat:58402008:755 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part12.dat:58402008:755?format=raw |
LEADER: 00755pam 2200217 i 4500
001 80013154
003 DLC
005 19801219000000.0
008 800317s1980 ne b 00100 eng
010 $a 80013154
020 $a0444853510
050 0 $aTK7874$b.F56
082 $a621.381/73
245 00 $aFine line lithography /$cedited by Roger Newman.
260 0 $aAmsterdam ;$aNew York :$bNorth-Holland Pub. Co. ;$aNew York :$bsole distributor for the USA and Canada, Elsevier North-Holland,$c1980.
300 $avii, 481 p. ;$c23 cm.
440 0 $aMaterials processing, theory and practices ;$vv. 1
504 $aIncludes bibliographies and index.
650 0 $aIntegrated circuits$xLarge scale integration.
650 0 $aLithography.
700 10 $aNewman, Roger.