| Record ID | marc_records_scriblio_net/part10.dat:154105714:983 |
| Source | Scriblio |
| Download Link | /show-records/marc_records_scriblio_net/part10.dat:154105714:983?format=raw |
LEADER: 00983cam 2200265 i 4500
001 78010624
003 DLC
005 19990716000000.0
008 780908s1978 dcua b f000 0 eng
010 $a 78010624
040 $aDLC$cDLC$dDLC
050 00 $aQC100$b.U57 no. 400-49$aTK7871.85
082 00 $a602/.1 s$a621.3815/2/028
086 0 $aC 13.10:400-49
245 00 $aAngular sensitivity of controlled implanted doping profiles /$cRobert G. Wilson ... [et al.].
260 $a[Washington] :$bU.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.,$c1978.
300 $avii, 54 p. :$bill. ;$c26 cm.
440 0 $aSemiconductor measurement technology
490 1 $aNBS special publication ; 400-49
504 $aIncludes bibliographical references.
650 0 $aSemiconductor doping.
650 0 $aIon implantation.
650 0 $aIntegrated circuits.
700 1 $aWilson, Robert G.
830 0 $aNBS special publication ;$v400-49.