MARC Record from marc_overdrive

LEADER: 02637nam 2200277Ka 4500
008 000000s2005 nyu s 000 0 eng d
040 $aTEFOD$cTEFOD
006 m d
007 cr cn---------
020 $a9780470020562 (electronic bk. : Adobe Digital Editions)
037 $bOverDrive, Inc.$nhttp://www.overdrive.com
100 1 $aFranssila, Sami $q(Sami Franssila).
245 10 $aIntroduction to Microfabrication$h[electronic resource].
260 $aNew York :$bJohn Wiley & Sons, Ltd.,$c2005.
500 $aTitle from eBook information screen.
520 $aMicrofabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: A comprehensive presentation of basic fabrication processes An emphasis on materials and microstructures, rather than device physics In-depth discussion on process integration showing how processes, materials and devices interact A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.
533 $aElectronic reproduction.$bNew York :$cJohn Wiley & Sons, Ltd.,$d2005.$nRequires Adobe Digital Editions (file size: 9401 KB).
538 $aRequires Adobe Digital Editions (file size: 9401 KB).
653 #0 $aEngineering
653 #0 $aNonfiction
653 #0 $aTechnology
655 7 $aElectronic books.$2local
776 1 $cOriginal$z9780470851067
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856 4 $uhttp://www.librarybin.com/ContentDetails.htm?ID=108061DF-14D8-4A70-A637-DC1EB19D72DA$zClick to purchase
856 4 $3Image$uhttp://images.contentreserve.com/ImageType-100/0128-1/{108061DF-14D8-4A70-A637-DC1EB19D72DA}Img100.jpg