MARC Record from Library of Congress

LEADER: 01996cam a22003138a 4500
001 2011014405
003 DLC
005 20111019101015.0
008 110520s2011 flu b 001 0 eng
010 $a 2011014405
020 $a9781420055191 (hardback)
040 $aDLC$cDLC
042 $apcc
050 00 $aTJ1191.5$b.M33 2011
082 00 $a620/.5$223
084 $aTEC027000$aTEC020000$aTEC008070$2bisacsh
100 1 $aMadou, Marc J.
245 10 $aManufacturing techniques for microfabrication and nanotechnology /$cMarc J. Madou.
260 $aBoca Raton, Fla. :$bCRC Press,$c2011.
263 $a1106
300 $ap. cm.
520 $a"Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Readers should use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine. "--$cProvided by publisher.
520 $a"In Part I, we review different forms of lithography, detailing those that differ most from the miniaturization processes used to fashion integrated circuits (ICs). In Part II we deal with material removal processes, additive technologies are the focus of Part III"--$cProvided by publisher.
504 $aIncludes bibliographical references and index.
650 0 $aMicrofabrication.
650 0 $aNanotechnology.
650 7 $aTECHNOLOGY & ENGINEERING / Nanotechnology & MEMS.$2bisacsh
650 7 $aTECHNOLOGY & ENGINEERING / Manufacturing.$2bisacsh
650 7 $aTECHNOLOGY & ENGINEERING / Electronics / Microelectronics.$2bisacsh