| Record ID | marc_loc_updates/v37.i43.records.utf8:35286597:1476 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v37.i43.records.utf8:35286597:1476?format=raw |
LEADER: 01476cam a22003134a 4500
001 2008276638
003 DLC
005 20091026144202.0
008 080820s2007 nju b 101 0 eng
010 $a 2008276638
040 $aDLC$cDLC$dDLC
020 $a9781566775694
020 $a1566775698
050 00 $aQD139.S44$bA53 2007
082 00 $a621.3815/2$222
245 00 $aAnalytical and diagnostic techniques for semiconductor materials, devices, and processes 7 / editors: D.K. Schroder .... [et al.].
260 $aPennington, NJ :$bElectrochemical Society,$cc2007.
300 $aviii, 394 p. :$bill. ;$c23 cm.
490 0 $aECS transactions ;$vvol. 11, no. 3
500 $a"VII Symposium ... part of the fall Electrochemical Society meeting in Washington, DC, held on October 7-12, 2007....seventh meeting"--P. iii.
500 $aSponsoring divisions: Electronics and Photonics; Dielectric Science & Technology.
500 $aDielectric and semiconductor materials, devices, and processing
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xAnalysis$vCongresses.
700 1 $aSchroder, Dieter K.
710 2 $aElectrochemical Society.$bMeeting$n(7th :$d2007 :$cWashington, D.C.)
710 2 $aElectrochemical Society.$bElectronics and Photonics Division.
710 2 $aElectrochemical Society.$bDielectric Science and Technology Division.
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/toc/fy0906/2008276638.html