| Record ID | marc_loc_updates/v37.i10.records.utf8:32396:1145 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v37.i10.records.utf8:32396:1145?format=raw |
LEADER: 01145cam a22002894a 4500
001 00031885
003 DLC
005 20090305080502.0
008 000418s2000 paua b 101 0 eng
010 $a 00031885
020 $a1558994920
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7874$b.M3439 2000
082 00 $a621.3815$221
245 00 $aMaterials issues and modeling for device nanofabrication :$bsymposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /$ceditors, Lhadi Merhari ... [et al.].
260 $aWarrendale, Pa. :$bMaterials Research Society,$cc2000.
300 $axiii, 340 p. :$bill. ;$c24 cm.
490 1 $aMaterials Research Society symposium proceedings ;$v584
504 $aIncludes bibliographical references and index.
650 0 $aIntegrated circuits$xDesign and construction$vCongresses.
650 0 $aNanotechnology$xCongresses.
650 0 $aIntegrated circuits$xMaterials$vCongresses.
650 0 $aMolecular electronics$vCongresses.
650 0 $aMicrolithography$vCongresses.
700 1 $aMerhari, Lhadi.
830 0 $aMaterials Research Society symposia proceedings ;$vv. 584.