| Record ID | marc_loc_updates/v35.i53.records.utf8:3735406:1054 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v35.i53.records.utf8:3735406:1054?format=raw |
LEADER: 01054cam a22002898a 4500
001 2007017041
003 DLC
005 20071231122319.0
008 070423s2008 nju b 001 0 eng
010 $a 2007017041
020 $a9780470083017 (cloth)
040 $aDLC$cDLC$dDLC
050 00 $aTK7874$b.H794 2008
082 00 $a621.381$222
100 1 $aHsu, Tai-Ran.
245 10 $aMems and microsystems :$bdesign, manufacture, and packaging /$cTai-Ran Hsu.
250 $a2nd ed.
260 $aHoboken, NJ :$bJohn Wiley,$cc2008.
263 $a0802
300 $ap. cm.
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectronics.
650 0 $aMicroelectromechanical systems.
650 0 $aMicroelectronic packaging.
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/toc/ecip0716/2007017041.html
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html
856 42 $3Contributor biographical information$uhttp://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html