| Record ID | marc_loc_updates/v35.i18.records.utf8:12727186:733 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_updates/v35.i18.records.utf8:12727186:733?format=raw |
LEADER: 00733nam a22002538a 4500
001 2007017041
003 DLC
005 20070424111445.0
008 070423s2008 nju b 001 0 eng
010 $a 2007017041
020 $a9780470083017 (cloth)
040 $aDLC$cDLC
050 00 $aTK7874$b.H794 2008
082 00 $a621.381$222
100 1 $aHsu, Tai-Ran.
245 10 $aMems and microsystems :$bdesign, manufacture, and packaging /$cTai-Ran Hsu.
250 $a2nd ed.
260 $aHoboken, NJ :$bJohn Wiley,$cc2008.
263 $a0802
300 $ap. cm.
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectronics.
650 0 $aMicroelectromechanical systems.
650 0 $aMicroelectronic packaging.