| Record ID | marc_loc_2016/BooksAll.2016.part38.utf8:32679745:1731 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part38.utf8:32679745:1731?format=raw |
LEADER: 01731cam a22003614a 4500
001 2010459286
003 DLC
005 20100724093057.0
008 100615s2008 waua b 101 0 eng d
010 $a 2010459286
020 $a9780819470119 (pbk.)
020 $a0819470112 (pbk.)
035 $a(OCoLC)ocn214041971
040 $aSCW$cSCW$dSCW$dDLC
042 $alccopycat
050 00 $aTK7875$b.M45392 2007
082 00 $a621.381$222
245 00 $aMEMS/MOEMS technologies and applications III :$b12-14 November 2007, Beijing, China /$cJung-Chih Chiao ... [et al.], editors ; sponsored by SPIE [and] COS--Chinese Optical Society ; cooperating organizations, OSJ--Optical Society of Japan ... [et al.] ; supporting organizations, CAST--China Association for Science and Technology (China), NNSF--National Nature Science Foundation (China), [and] the Ministry of Science and Technology (China).
246 30 $aMOEMS technologies and applications III
260 $aBellingham, Wash. :$bSPIE,$cc2008.
300 $a1 v. (various pagings) :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE;$vv. 6836
504 $aIncludes bibliographical references and author index.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aOptoelectronic devices$vCongresses.
700 1 $aChiao, Jung-Chih.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aZhongguo guang xue xue hui.
710 2 $aNihon Kōgakkai (Ōyō Butsuri Gakkai)
710 2 $aZhongguo ke xue ji shu xie hui.
710 2 $aGuo jia zi ran ke xue ji jin wei yuan hui (China)
710 1 $aChina.$bGuo jia ke xue ji shu bu.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 6836.