MARC Record from Library of Congress

LEADER: 01905cam a22003497a 4500
001 2005278237
003 DLC
005 20051020101948.0
008 050616s2005 waua b 101 0 eng d
010 $a 2005278237
020 $a0819456101
035 $a(OCoLC)ocm58993269
040 $aLHL$cLHL$dCLU$dDLC
042 $alccopycat
050 00 $aTK7875$b.M52 2005
082 00 $a620/.5$222
245 00 $aMicro- and nanotechnology :$bmaterials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia /$cJung-Chih Chiao ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, University of New South Wales (Australia) ... [et al.] ; cooperating organizations, University of Adelaide (Australia), Centre for Biomedical Engineering, Adelaide (Australia).
260 $aBellingham, Wash. :$bSPIE,$cc2005.
300 $axlviii, 572 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series,$x0277-786X ;$vv. 5650
500 $a"Part of SPIE's 2004 International Symposium on Smart Materials, Nano-, and Micro-Smart Systems, held at University of New South Wales, Sydney, Australia, on 12-15 December 2004"--P. xiii.
504 $aIncludes bibliographical references and author index.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aMicrotechnology$xMaterials$vCongresses.
650 0 $aNanotechnology$xMaterials$vCongresses.
650 0 $aElectronic packaging$vCongresses.
700 1 $aChiao, Jung-Chih.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aUniversity of New South Wales.
710 2 $aUniversity of Adelaide.
711 2 $aInternational Symposium on Smart Materials, Nano-, and Micro-Smart Systems$d(2004 :$cUniversity of New South Wales)
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 5650.