| Record ID | marc_loc_2016/BooksAll.2016.part32.utf8:169795481:1169 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part32.utf8:169795481:1169?format=raw |
LEADER: 01169cam a22003254a 4500
001 2005046670
003 DLC
005 20061115082453.0
008 051209s2007 fluaf b 001 0 eng
010 $a 2005046670
015 $aGBA612882$2bnb
016 7 $a013375896$2Uk
020 $a0849336821 (alk. paper)
020 $a9780849336829
035 $a(OCoLC)ocm62892204
040 $aDLC$cDLC$dUKM$dBAKER$dC#P$dIXA$dDLC
042 $apcc
050 00 $aTS156.2$b.O652 2007
082 00 $a670.42/5$222
245 00 $aOptical inspection of microsystems /$cedited by Wolfgang Osten.
260 $aBoca Raton, FL :$bCRC/Taylor & Francis,$cc2007.
300 $a503 p., [8] p. of plates :$bill. (some col.) ;$c27 cm.
490 1 $aOptical science and engineering ;$v109
504 $aIncludes bibliographical references and index.
650 0 $aQuality control$xOptical methods.
650 0 $aOptical detectors$xIndustrial applications.
650 0 $aMicroelectronics.
700 1 $aOsten, Wolfgang.
830 0 $aOptical science and engineering (Boca Raton, Fla.) ;$v109.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html