| Record ID | marc_loc_2016/BooksAll.2016.part29.utf8:233073673:1542 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part29.utf8:233073673:1542?format=raw |
LEADER: 01542cam a2200313 a 4500
001 2002277514
003 DLC
005 20030922095102.0
008 020315s2001 waua b 101 0 eng d
010 $a 2002277514
035 $a(OCoLC)ocm47062093
040 $aLHL$cLHL$dDLC
042 $alccopycat
020 $a0819440396
050 00 $aTK7872.M3$bE97 2000
082 00 $a621.3815$221
111 2 $aEuropean Conference on Mask Technology for Integrated Circuits and Microcomponents$n(17th :$d2000 :$cMunich, Germany)
245 10 $a17th European Conference on Mask Technology for Integrated Circuits and Microcomponents :$bproceedings : 13-14 November 2000, Munich, Germany /$cUwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany) ; published by, SPIE--The International Society for Optical Engineering.
246 31 $aMask technology for integrated circuits and microcomponents
260 $aBellingham, Washington :$bSPIE,$cc2001.
300 $ax, 192 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 4349
504 $aIncludes bibliographic references and author index.
650 0 $aIntegrated circuits$xMasks$vCongresses.
650 0 $aMicrolithography$vCongresses.
700 1 $aBehringer, Uwe F. W.
710 2 $aVDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4349.