MARC Record from Library of Congress

LEADER: 01778nam a2200337 a 4500
001 97075227
003 DLC
005 19981110104231.3
008 980513s1998 nyua b 101 0 eng d
010 $a 97075227
020 $a1563967693
035 $a(OCoLC)38728791
040 $aIaAS$cIaAS$dDLC
042 $alccopycat
050 04 $aQC718.5.E66$bI58 1997
082 00 $a530.4/17$221
111 2 $aInternational Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces$d(1997 :$cTanabe-shi, Japan)
245 10 $aPapers from the International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces (BANPIS '97) :$b26-27 January 1997, Nanki Seaside Lodge, Shirahama, Wakayama, Japan /$csponsored by AFOSR/AOARD ; in cooperation with the Japan Society of Applied Physics and the American Vacuum Society.
246 18 $aInternational Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces
260 $aNew York :$bPublished for the American Vacuum Society by the American Institute of Physics,$c1998.
300 $ap. 212-382 :$bill. ;$c29 cm.
500 $a"Published in both the 1998 Jan/Feb issue of the Jourl nal of vacuum science and technology A, vol. 16, no. 1 and in a special casebound edition available to participants"--T.p. verso.
504 $aIncludes bibliographical references and index.
650 0 $aNonequilibrium plasmas$xCongresses.
650 0 $aPlasma etching$xCongresses.
650 0 $aMicroelectronics$xCongresses.
650 0 $aSurfaces (Physics)$xCongresses.
650 0 $aSurfaces (Technology)$xCongresses.
710 1 $aUnited States.$bAir Force.$bAsian Office of Aerospace Research and Development.
710 2 $aŌyō Butsuri Gakkai.
710 2 $aAmerican Vacuum Society.