| Record ID | marc_loc_2016/BooksAll.2016.part01.utf8:50150307:1089 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part01.utf8:50150307:1089?format=raw |
LEADER: 01089cam a22002894a 4500
001 00069344
003 DLC
005 20030930085059.0
008 001212s2001 enka b 000 0 eng
010 $a 00069344
020 $a047152185X
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7875$b.V37 2001
082 00 $a621.381$221
100 1 $aVaradan, V. K.,$d1943-
245 10 $aMicrostereolithography and other fabrication techniques for 3D MEMS /$cVijay K. Varadan, Xiaoning Jiang, and Vasundara V. Varadan.
260 $aChichester ;$aNew York :$bJ. Wiley,$cc2001.
300 $axiii, 260 p. :$bill. ;$c24 cm.
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$xDesign and construction.
650 0 $aMicrolithography.
650 0 $aThree-dimensional display systems.
700 1 $aJiang, Xiaoning.
700 1 $aVaradan, V. V.,$d1948-
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/description/wiley036/00069344.html
856 4 $3Table of Contents$uhttp://www.loc.gov/catdir/toc/onix07/00069344.html