| Record ID | marc_loc_2016/BooksAll.2016.part01.utf8:187500251:1383 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part01.utf8:187500251:1383?format=raw |
LEADER: 01383cam a22003014a 4500
001 00501398
003 DLC
005 20011121105438.0
008 000318s1999 waua b 101 0 eng
010 $a 00501398
020 $a0819434949
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7875$b.D465 1999
082 00 $a621.381$221
245 00 $aDesign, characterization, and packaging for MEMS and microelectronics :$b27-29 October 1999, Royal Pines Resort, Queensland, Australia /$cBernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia).
260 $aBellingham, Wash. :$bSPIE,$cc1999.
300 $ax, 512 p. :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE,$x0277-786X ;$vv. 3893
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$xDesign and construction$vCongresses.
650 0 $aMicroelectronic packaging$vCongresses.
700 1 $aCourtois, B.$q(Bernard)
700 1 $aDemidenko, S. N.$q(Sergeĭ Nikolaevich)
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aIREE Society.
710 2 $aQueensland.$bGovernment State Development.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3893.