MARC Record from marc_columbia

LEADER: 09425cam a22009854a 4500
001 15074042
005 20211113231800.0
006 m o d
007 cr cn|---ancau
008 051209s2007 fluaf ob 001 0 eng c
010 $a 2005046670
035 $a(OCoLC)ocn259519513
035 $a(NNC)15074042
040 $aPUL$beng$epn$cPUL$dWAU$dN$T$dYDXCP$dDEBBG$dIDEBK$dE7B$dOCLCQ$dUIU$dOCLCQ$dMYPMP$dOCLCQ$dTULIB$dOCLCF$dOCLCO$dCRCPR$dOCLCQ$dCOO$dOCLCQ$dOCLCA$dUAB$dOTZ$dOCLCQ$dOCLCO$dOCLCA$dCEF$dNLE$dOCLCO$dUKMGB$dOCLCO$dYDX$dAU@$dMERER$dOCLCQ$dLEAUB$dESU$dUX1$dUKAHL$dNLW$dUPM$dTEF$dOCLCO$dDINAT$dOCLCO
015 $aGBA612882$2bnb
016 7 $a018454641$2Uk
016 7 $z013375896$2Uk
019 $a156886738$a247016914$a648228601$a664114851$a667100385$a779921284$a1004620431$a1044294409$a1044328067$a1047692059$a1055840423$a1088953999$a1091751423$a1097086821
020 $z0849336821$q(alk. paper)
020 $a9780849336829
020 $a0849336821
020 $a9781420019162$q(electronic bk.)
020 $a1420019163$q(electronic bk.)
020 $a9781315221250$q(e-book)
020 $a131522125X
020 $a9781351828451$q(e-book: Mobi)
020 $a1351828452
020 $a1281095184
020 $a9781281095183
020 $a9786611095185
020 $a6611095187
024 7 $a10.1201/9781420019162$2doi
035 $a(OCoLC)259519513$z(OCoLC)156886738$z(OCoLC)247016914$z(OCoLC)648228601$z(OCoLC)664114851$z(OCoLC)667100385$z(OCoLC)779921284$z(OCoLC)1004620431$z(OCoLC)1044294409$z(OCoLC)1044328067$z(OCoLC)1047692059$z(OCoLC)1055840423$z(OCoLC)1088953999$z(OCoLC)1091751423$z(OCoLC)1097086821
037 $aDK5855$b00004766
042 $apcc
050 4 $aTS156.2$b.O652 2007
072 7 $aTEC$x009060$2bisacsh
082 04 $a670.42/5$222
084 $aUQ 8010$2rvk
084 $aZN 3750$2rvk
084 $aZQ 3120$2rvk
084 $aELT 530f$2stub
084 $aMSR 415f$2stub
084 $aTEC 025f$2stub
049 $aZCUA
245 00 $aOptical inspection of microsystems /$cedited by Wolfgang Osten.
260 $aBoca Raton, FL :$bCRC/Taylor & Francis,$c©2007.
300 $a1 online resource (503 pages, 8 unnumbered pages of plates) :$billustrations (some color).
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
347 $adata file$2rda
490 1 $aOptical science and engineering ;$v109
504 $aIncludes bibliographical references and index.
505 0 $aImage Processing and Computer Vision for MEMS Testing ; Markus Hüttel ; Introduction; Classification of Tasks; Image Processing and Computer Vision Components; Processing and Analysis of Image Data; Commercial and Noncommercial Image Processing and Computer Vision Software; Image Processing Techniques for the Processing of Fringe Patterns in Optical Metrology; Conclusion; References; Image Correlation Techniques for Microsystems Inspection ; Dietmar Vogel and Bernd Michel ; Introduction; Deformation Measurement by Digital Image Correlation (DIC) Techniques; Base Equipment for DIC Applications; Applications of DIC Techniques to Microsystems; Conclusions and Outlook; References; Light Scattering Techniques for the Inspection of Microcomponents and Microstructures ; Angela Duparré ; Introduction; Theoretical Background of Light Scattering; Measurement Equipment.
505 0 $a; Standardization of Light Scattering Methods; Applications for Microcomponent and Microstructure Inspection; Combination of Light Scattering and Profilometric Techniques; Conclusions and Outlook; References; Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM) ; F. Michael Serry and Joanna Schmit ; Introduction; Components of AFM and Principles of AFM Operation; AFM Imaging Modes; AFM Nonimaging Modes; Applications of AFM for Microcomponent Inspection: A Case Study; Atomic Force Profilometer (AFP) -- A Combination of AFM and Stylus Profiler; Optical Metrology Complementary to AFM; Conclusions and Outlook; References; Optical Profiling Techniques for MEMS Measurement ; Klaus Körner, Aiko Ruprecht,
505 0 $aAnd Tobias Wiesendanger ; Introduction; Principles of Confocal Microscopy; Principle of Microscopic Depth-Scanning Fringe Projection (DSFP); Conclusion; References; Grid and Moiré Methods for Micromeasurements ; Anand Asundi, Bing Zhao,
505 0 $aAnd Huimin Xie ; Introduction; Grid or Grating Fabrication Methods; Micro-Moiré Interferometer; Moiré Methods Using High-Resolution Microscopy; Microscopic Grid Methods; Conclusions; References; Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents ; Leszek Salbut ; Introduction; Principle of Grating Interferometry; Waveguide Grating Interferometry; Measurement System; SG Technology; Exemplary Applications of WGI; Conclusions; References; Interference Microscopy Techniques for Microsystem Characterization ; Alain Bosseboeuf and Sylvain Petitgrand ; Introduction; Interference Microscopes; Modeling of Two-Beam Homodyne Interference Microscopes; Static Measurements by Interference Microscopy; Performance and Issues of Interference Microscopy; Applications of Interferometric Profilometers in the MEMS Field; Dynamic Measurements.
505 0 $aBy Interference Microscopy; Conclusion; Acknowledgments; References; Measuring MEMS in Motion by Laser Doppler Vibrometry ; Christian Rembe, Georg Siegmund, Heinrich Steger, and Michael Wörtge ; Introduction; Laser Doppler Effect and Its Interferometric Detection; Techniques of Laser Doppler Vibrometry; Full-Field Vibrometry; Measuring on Microscopic Structures; Resolution and Accuracy; Combination with Other Techniques; Examples; Conclusion and Outlook; References; An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS ; Christophe Gorecki, Michal Jozwik,
505 0 $aAnd Patrick Delobelle ; Introduction; Interferometric Platform Architecture and Principle of Operation; Optomechanical Characterization of Membranes by "Pointwise" Deflection Method; Mechanical Expertise of Scratch Drive Actuators via Interferometric Measurement of Out-of-Plane Microdisplacements; Dynamic Evaluation of Active MOEMS by Interferometry Using Stroboscopic Technique; General Conclusion and Outlook; Acknowledgments; References; Optoelectronic Holography for Testing Electronic Packaging and MEMS ; Cosme Furlong ; Introduction; Overview of MEMS Fabrication Processes; Optoelectronic Holography; Representative Applications; Summary; Acknowledgments; References; Digital Holography and Its Application in MEMS/MOEMS Inspection ; Wolfgang Osten and Pietro Ferraro ; Introduction; Theory and Basic Principle of Digital Holography (DH); Digital Holographic Interferometry.
505 0 $a; Digital Holographic Microscopy (DHM); The Application of DH to the Investigation of Microcomponents; Conclusion; References; Speckle Metrology for Microsystem Inspection ; Roland Höfling and Petra Aswendt ; Introduction; Basics; Applications; Conclusion; References; Spectroscopic Techniques for MEMS Inspection ; Ingrid De Wolf ; Introduction; Raman Spectroscopy (RS); Spectroscopic Ellipsometry (SE); Dual-Beam Spectroscopy (DBS); X-Ray Photoelectron Spectroscopy (XPS); High-Resolution Electron Energy Loss Spectroscopy (HREELS); Auger Electron Spectroscopy (AES); Brillouin Scattering (BS); Conclusions; References; Index.
520 $aWhere conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical me.
546 $aEnglish.
650 0 $aMicroelectronics.
650 0 $aOptical detectors$xIndustrial applications.
650 0 $aQuality control$xOptical methods.
650 6 $aQualité$xContrôle$xMéthodes optiques.
650 6 $aDétecteurs optiques.
650 6 $aMicrosystèmes électromécaniques.
650 6 $aDispositifs optoélectroniques.
650 6 $aContrôle technique$xAutomatisation.
650 7 $aTECHNOLOGY & ENGINEERING$xIndustrial Engineering.$2bisacsh
650 7 $aMicroelectronics.$2fast$0(OCoLC)fst01019757
650 7 $aOptical detectors$xIndustrial applications.$2fast$0(OCoLC)fst01046686
650 7 $aQuality control$xOptical methods.$2fast$0(OCoLC)fst01084993
650 7 $aMEMS$2gnd
650 7 $aMikrosystemtechnik$2gnd
650 7 $aOptische Analyse$2gnd
655 0 $aElectronic books.
655 4 $aElectronic books.
700 1 $aOsten, Wolfgang.
776 08 $iPrint version:$tOptical inspection of microsystems.$dBoca Raton, FL : CRC/Taylor & Francis, ©2007$z0849336821$z9780849336829$w(DLC) 2005046670$w(OCoLC)62892204
830 0 $aOptical science and engineering (CRC Press) ;$v109.
856 40 $uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio15074042$zTaylor & Francis eBooks
852 8 $blweb$hEBOOKS