MARC Record from marc_columbia

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020 $a9781417577828$q(electronic bk.)
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035 $a(OCoLC)228146237$z(OCoLC)57926007$z(OCoLC)191039433$z(OCoLC)228146238$z(OCoLC)482043566$z(OCoLC)488498634$z(OCoLC)560288651$z(OCoLC)607205002$z(OCoLC)607205004$z(OCoLC)636836694$z(OCoLC)636836709$z(OCoLC)646738484$z(OCoLC)666960928$z(OCoLC)722397737$z(OCoLC)728014850$z(OCoLC)961552525$z(OCoLC)962569206$z(OCoLC)966220498$z(OCoLC)973974768$z(OCoLC)974192031$z(OCoLC)974521185$z(OCoLC)974574988$z(OCoLC)982307452$z(OCoLC)988490104$z(OCoLC)991982743$z(OCoLC)1018082556$z(OCoLC)1037791271$z(OCoLC)1038637144$z(OCoLC)1042323117$z(OCoLC)1042984780$z(OCoLC)1045492269$z(OCoLC)1047955447$z(OCoLC)1055250337$z(OCoLC)1055391319$z(OCoLC)1062893738$z(OCoLC)1081292023$z(OCoLC)1082204026$z(OCoLC)1096480680$z(OCoLC)1153555600
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111 2 $aInternational Symposium on Particles on Surfaces: Detection, Adhesion, and Removal$n(8th :$d2002 :$cProvidence, R.I.)
245 10 $aParticles on surfaces 8 :$bdetection, adhesion and removal /$ceditor, K.L. Mittal.
246 3 $aParticles on surfaces eight
260 $aUtrecht ;$aBoston :$bVSP,$c2003.
300 $a1 online resource (viii, 352 pages) :$billustrations
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
347 $adata file$2rda
500 $a"This volume documents the proceedings of the 8th International Symposium on Particles on Surfaces: Detection, Adhesion, and Removal held under the auspices of MST Conferences in Providence, Rhode Island, June 24-26, 2002.
504 $aIncludes bibliographical references.
588 0 $aPrint version record.
505 0 $aPreface; The nature and characterization of small particles; Surface and micro-analytical methods for particle identification; The haze of a wafer: A new approach to monitor nano-sized particles; Particle transport and adhesion in an ultra-clean ion-beam sputter deposition process; Particle deposition from a carry-over layer during immersion rinsing; The use of surfactants to reduce particulate contamination on surfaces; The use of rectangular jets for surface decontamination; Ice-air blast cleaning: Case studies.
520 $aThis work documents the proceedings of the 8th International Symposium on Particles on Surfaces - Detection, Adhesion and Removal, held in Providence, Rhode Island, from June 24-26, 2002. Topics include nature and characterization of small particles, and particle deposition during immersion rinsing.
506 $3Use copy$fRestrictions unspecified$2star$5MiAaHDL
533 $aElectronic reproduction.$b[Place of publication not identified] :$cHathiTrust Digital Library,$d2010.$5MiAaHDL
538 $aMaster and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.$uhttp://purl.oclc.org/DLF/benchrepro0212$5MiAaHDL
583 1 $adigitized$c2010$hHathiTrust Digital Library$lcommitted to preserve$2pda$5MiAaHDL
650 0 $aParticles$vCongresses.
650 0 $aSurfaces (Technology)$vCongresses.
650 7 $aTECHNOLOGY & ENGINEERING$xNanotechnology & MEMS.$2bisacsh
650 7 $aParticles.$2fast$0(OCoLC)fst01054113
650 7 $aSurfaces (Technology)$2fast$0(OCoLC)fst01139278
655 0 $aElectronic book.
655 4 $aElectronic books.
655 7 $aConference papers and proceedings.$2fast$0(OCoLC)fst01423772
700 1 $aMittal, K. L.,$d1945-
776 08 $iPrint version:$aInternational Symposium on Particles on Surfaces: Detection, Adhesion, and Removal (8th : 2002 : Providence, R.I.).$tParticles on surfaces 8.$dUtrecht ; Boston : VSP, 2003$w(DLC) 2004270449
856 40 $uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio15071746$zTaylor & Francis eBooks
852 8 $blweb$hEBOOKS