MARC Record from marc_columbia

LEADER: 05933cam a2200709Ii 4500
001 14755691
005 20210607120657.0
006 m o d
007 cr cnu|||unuuu
008 190624t20202020flua ob 001 0 eng d
035 $a(OCoLC)on1105556886
035 $a(NNC)14755691
040 $aN$T$beng$erda$epn$cN$T$dN$T$dTYFRS$dUKMGB$dOCLCF$dYDX$dUBY
015 $aGBB9C6200$2bnb
016 7 $a019459951$2Uk
020 $a9780429186738$q(electronic bk.)
020 $a0429186738$q(electronic bk.)
020 $a9780429547355$q(electronic bk. : Mobipocket)
020 $a0429547358$q(electronic bk. : Mobipocket)
020 $a9780429532658$q(electronic bk. : EPUB)
020 $a0429532652$q(electronic bk. : EPUB)
020 $a9781498779500$q(electronic bk. : PDF)
020 $a1498779506$q(electronic bk. : PDF)
020 $z9781498779470
024 8 $a10.1201/9780429186738$2doi
035 $a(OCoLC)1105556886
037 $a9780429532658$bIngram Content Group
050 4 $aTK7874.58
072 7 $aTEC$x009060$2bisacsh
072 7 $aTEC$x018000$2bisacsh
072 7 $aTEC$x020000$2bisacsh
072 7 $aTEC$x040000$2bisacsh
082 04 $a670.42/5$223
049 $aZCUA
245 00 $aOptical inspection of microsystems /$cedited by Wolfgang Osten.
250 $aSecond edition.
264 1 $aBoca Raton, FL :$bCRC Press/Taylor & Francis Group,$c[2020]
264 4 $c©2020
300 $a1 online resource :$billustrations
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
520 $aWhere conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book: Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems; Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques; Offers numerous practical examples and illustrations; Includes calibration of optical measurement systems for the inspection of MEMS; Presents the characterization of dynamics of MEMS.
504 $aIncludes bibliographical references and index.
588 0 $aOnline resource; title from PDF title page (EBSCO, viewed June 25, 2019).
505 0 $aImage processing and computer vision for MEMS testing -- Surface features -- A metrological characteristics approach to uncertainty in surface metrology -- Image correlation techniques for microsystems inspection -- Light scattering techniques for the inspection of microcomponents and structures -- Characterization and measurement of microcomponents with the atomic force microscope (AFM) -- Optical profiling techniques for MEMS measurement -- Grid and moiré methods for micromeasurements -- Grating (moiré) interferometry for in-plane displacement and strain measurement of microcomponents -- Interference microscopy techniques for microsystem characterization -- Measuring MEMS in motion by laser dopler vibrometry -- An interferometric platform for static, quasi-static, and dynamic evaluation of out-of-plane deformations of MEMS and MOEMS -- Optoelectronic holography for testing electronic packaging and MEMS -- Digital holography and its application in MEMS/MOEMS inspection -- Speckle metrology for microsystem inspection -- Spectroscopic techniques for MEMS inspection -- Sensor fusion in multiscale inspection systems -- Index.
650 0 $aMicroelectromechanical systems$xInspection.
650 0 $aQuality control$xOptical methods.
650 0 $aOptical measurements.
650 0 $aIndustrial microscopy.
650 7 $aTECHNOLOGY & ENGINEERING / Industrial Engineering.$2bisacsh
650 7 $aTECHNOLOGY & ENGINEERING / Industrial Technology.$2bisacsh
650 7 $aTECHNOLOGY & ENGINEERING / Manufacturing.$2bisacsh
650 7 $aTECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades.$2bisacsh
650 7 $aIndustrial microscopy.$2fast$0(OCoLC)fst00971363
650 7 $aOptical measurements.$2fast$0(OCoLC)fst01046776
650 7 $aQuality control$xOptical methods.$2fast$0(OCoLC)fst01084993
655 0 $aElectronic books.
655 4 $aElectronic books.
700 1 $aOsten, Wolfgang,$eeditor.
856 40 $uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio14755691$zTaylor & Francis eBooks
852 8 $blweb$hEBOOKS