| Record ID | marc_columbia/Columbia-extract-20221130-007.mrc:478277801:1999 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-007.mrc:478277801:1999?format=raw |
LEADER: 01999cam a2200397 i 4500
001 3475341
005 20221020075925.0
008 790320s1979 dcua f000 0 eng d
010 $a 79600002
020 $c$3.00 (pbk. :)
035 $a(OCoLC)ocm04767710
035 $9AJG1473DC
035 $a(NNC)3475341
035 $a3475341
037 $b20402
040 $aTRL$cTRL$dGPO$dMvI
074 $a247
086 0 $aC 13.10:400-57
099 $aC 13.10:400-57
100 1 $aGilsinn, David,$d1943-$0http://id.loc.gov/authorities/names/n79041171
245 10 $aDISTRIB I :$ban impurity redistribution computer program /$cDavid Gilsinn, Institute for Computer Sciences and Technology, National Bureau of Standards, and Richard Kraft, Center for Applied Mathematics, National Engineering Laboratory, National Bureau of Standards.
260 $aWashington :$bDepartment of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U. S. Govt. Print. Off.,$c1979.
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
490 1 $aNBS special publication ;$v400-57
490 1 $aSemiconductor measurement technology
500 $aThis activity was supported by the Defense Advanced Research Projects Agency.
650 0 $aSilicon.$0http://id.loc.gov/authorities/subjects/sh85122512
650 0 $aOxidation.$0http://id.loc.gov/authorities/subjects/sh85096307
700 1 $aKraft, Richard,$eauthor.$4http://id.loc.gov/vocabulary/relators/aut$0http://id.loc.gov/authorities/names/n79041170
710 2 $aInstitute for Computer Sciences and Technology.$0http://id.loc.gov/authorities/names/n79059666
710 2 $aCenter for Applied Mathematics (U.S.)$0http://id.loc.gov/authorities/names/n79141887
710 1 $aUnited States.$bDefense Advanced Research Projects Agency.$0http://id.loc.gov/authorities/names/n79004228
830 0 $aNBS special publication ;$v400-57.
830 0 $aSemiconductor measurement technology.
852 30 $boff,docs$hC 13.10:400-57