| Record ID | marc_columbia/Columbia-extract-20221130-007.mrc:44156891:1954 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-007.mrc:44156891:1954?format=raw |
LEADER: 01954mam a2200337 a 4500
001 3034902
005 20221019202424.0
008 010605t20012001waua b 101 0 eng d
020 $a0819440396
035 $a(OCoLC)ocm47062093
035 $9ATJ6148CU
035 $a(NNC)3034902
035 $a3034902
040 $aLHL$cLHL
090 $aTK7872.M3$bE97 2000
111 2 $aEuropean Conference on Mask Technology for Integrated Circuits and Microcomponents$n(17th :$d2000 :$cMunich, Germany)
245 10 $a17th European Conference on Mask Technology for Integrated Circuits and Microcomponents :$bproceedings : 13-14 November, 2000, Munich, Germany /$cUwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany) ; published by, SPIE--The International Society for Optical Engineering.
246 31 $aMask technology for integrated circuits and microcomponents
260 $aBellingham, Washington :$bSPIE,$c[2001], ©2001.
300 $ax, 192 pages :$billustrations ;$c28 cm.
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
490 1 $aSPIE proceedings series ;$vv. 4349
504 $aIncludes bibliographic references and author index.
650 0 $aIntegrated circuits$xMasks$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2008104740
650 0 $aMicrolithography$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2008107753
700 1 $aBehringer, Uwe F. W.$0http://id.loc.gov/authorities/names/no2001075706
710 2 $aVDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.$0http://id.loc.gov/authorities/names/n98108439
710 2 $aSociety of Photo-optical Instrumentation Engineers.$0http://id.loc.gov/authorities/names/n78088934
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4349.$0http://id.loc.gov/authorities/names/n42030541
852 00 $boff,eng$hTK7872.M3$iE89 2000g