| Record ID | marc_columbia/Columbia-extract-20221130-001.mrc:190569653:1542 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-001.mrc:190569653:1542?format=raw |
LEADER: 01542cam a2200361 a 4500
001 152762
005 20220518204901.0
008 830117s1981 waua b 101 0 eng
010 $a 81051404
020 $a0892523093 (pbk.)
035 $a(OCoLC)7472758
035 $a(OCoLC)ocm07472758
035 $a(CStRLIN)NYCG83-B2722
035 $9AAS2211CU
035 $a(NNC)152762
035 $a152762
050 00 $aTK7871.85$b.O6
082 0 $a621.3815/2/0287$219
090 $aTK7871.85$b.O6
245 00 $aOptical characterization techniques for semiconductor technology :$bApril 1-2, 1981, San Jose, California /$cD.E. Aspnes, S. So, R.F. Potter, editors.
260 $aBellingham, Wash. :$bSociety of Photo-optical Instrumentation Engineers,$c1981.
300 $ax, 262 pages :$billustrations ;$c28 cm.
336 $atext$2rdacontent
337 $aunmediated$2rdamedia
338 $avolume$2rdacarrier
490 1 $aProceedings of the Society of Photo-optical Instrumentation Engineers ;$vv. 276
504 $aIncludes bibliographical references and indexes.
650 0 $aSemiconductors$xTesting$xOptical methods$vCongresses.
700 1 $aAspnes, D. E.$0http://id.loc.gov/authorities/names/n81101437
700 1 $aSo, S.$q(Samuel S.)$0http://id.loc.gov/authorities/names/n81101436
700 1 $aPotter, Roy F.$0http://id.loc.gov/authorities/names/n80129890
830 0 $aProceedings of the Society of Photo-optical Instrumentation Engineers ;$vv. 276.$0http://id.loc.gov/authorities/names/n42030542
852 00 $beng$hTK7871.85$i.O6