| Record ID | ia:handbookofsemico0000unse |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/handbookofsemico0000unse/handbookofsemico0000unse_marc.xml |
| Download MARC binary | https://www.archive.org/download/handbookofsemico0000unse/handbookofsemico0000unse_meta.mrc |
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001 ocm49708232
003 OCoLC
005 20201021080935.0
008 011108s1993 njua obf 001 0 eng d
006 m o d
007 cr un|||||||||
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050 4 $aTK7871.85$b.H335 1993eb
082 04 $a621.3815/2$222
245 00 $aHandbook of semiconductor wafer cleaning technology :$bscience, technology, and applications /$cedited by Werner Kern.
260 $aPark Ridge, N.J., U.S.A. :$bNoyes Publications,$c©1993.
300 $a1 online resource (xx, 623 pages) :$billustrations.
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
490 1 $aMaterials science and process technology series. Electronic materials and process technology
520 $aDiscusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
504 $aIncludes bibliographical references and index.
588 0 $aPrint version record.
505 0 $a12. Ultratrace Impurity Analysis of Silicon Surfaces by SIMS and TXRF Methods / Richard S. Hockett -- 13. Future Directions / Werner Kern.
506 $3Use copy$fRestrictions unspecified$2star$5MiAaHDL
533 $aElectronic reproduction.$b[S.l.] :$cHathiTrust Digital Library,$d2010.$5MiAaHDL
538 $aMaster and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.$uhttp://purl.oclc.org/DLF/benchrepro0212$5MiAaHDL
583 1 $adigitized$c2010$hHathiTrust Digital Library$lcommitted to preserve$2pda$5MiAaHDL
546 $aEnglish.
650 0 $aSemiconductor wafers$xCleaning.
650 7 $aSemiconductor wafers$xCleaning.$2fast$0(OCoLC)fst01112190
650 7 $aSemicondutores.$2larpcal
650 7 $aElectrical & Computer Engineering.$2hilcc
650 7 $aEngineering & Applied Sciences.$2hilcc
650 7 $aElectrical Engineering.$2hilcc
655 4 $aElectronic books.
655 0 $aElectronic books.
700 1 $aKern, Werner,$d1925-
776 08 $iPrint version:$tHandbook of semiconductor wafer cleaning technology.$dPark Ridge, N.J., U.S.A. : Noyes Publications, ©1993$z0815513313$w(DLC) 93004078$w(OCoLC)27976222
830 0 $aMaterials science and process technology series.$pElectronic materials and process technology.
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856 40 $3Knovel$uhttp://app.knovel.com/hotlink/toc/id:kpHSWCTSTB/handbook-of-semiconductor
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