| Record ID | ia:epitaxyphysicalp0000herm |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/epitaxyphysicalp0000herm/epitaxyphysicalp0000herm_marc.xml |
| Download MARC binary | https://www.archive.org/download/epitaxyphysicalp0000herm/epitaxyphysicalp0000herm_meta.mrc |
LEADER: 01180cam a22003014a 4500
001 2003059146
003 DLC
005 20080308091458.0
008 030805s2004 gw a b 001 0 eng
010 $a 2003059146
020 $a3540678212 (acid-free paper)
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aQD921$b.H48 2004
082 00 $a621.3815/2$222
100 1 $aHerman, Marian A.
245 10 $aEpitaxy :$bphysical principles and technical implementation /$cMarian A. Herman, Wolfgang Richter, Helmut Sitter.
260 $aBerlin ;$aNew York :$bSpringer,$cc2004.
300 $axv, 522 p. :$bill. ;$c24 cm.
490 1 $aSpringer series in materials science,$x0933-033X ;$v62
504 $aIncludes bibliographical references (p. [467]-499) and index.
650 0 $aEpitaxy.
650 0 $aThin films, Multilayered$xTechnique.
700 1 $aRichter, Wolfgang,$d1940-
700 1 $aSitter, Helmut,$d1951-
830 0 $aSpringer series in materials science ;$vv. 62.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0816/2003059146-d.html
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/enhancements/fy0816/2003059146-t.html