| Record ID | harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:515901548:732 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:515901548:732?format=raw |
LEADER: 00732pam a22002534a 4500
001 012652329-0
005 20110110141533.0
008 041102s2005 waua b 001 0 eng
010 $a 2004025977
020 $a0819456608
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7874$b.L397 2005
082 00 $a621.3815/31$222
100 1 $aLevinson, Harry J.
245 10 $aPrinciples of lithography /$cHarry J. Levinson.
250 $a2nd ed.
260 $aBellingham, WA :$bSPIE Press,$cc2005.
300 $axii, 423 p. :$bill. ;$c26 cm.
504 $aIncludes bibliographical references and index.
650 0 $aIntegrated circuits$xDesign and construction.
650 0 $aMicrolithography.
988 $a20110110
906 $0DLC