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Field Guide to Optical Lithography
Jan 24, 2006, SPIE Publications
spiral-bound
0819462071 9780819462077
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Source title: Field Guide to Optical Lithography (SPIE Vol. FG06)
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The Physical Object
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{{cite book|author=Chris A. Mack |date=Jan 24, 2006 |title=Field Guide to Optical Lithography |publisher=SPIE Publications |isbn=978-0-8194-6207-7 |lccn=2005034584 |ol=33026200M}}

