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Publish Date
1987
Pages
456
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Subjects
Congresses, Electron beams, Ion bombardment, Photon beamsShowing 1 featured edition. View all 1 editions?
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Proceedings of the 30th International Symposium on Electron, Ion, and Photon Beams, 27-30 May 1986, Boston, Massachusetts
1987, Published for the American Vacuum Society by the American Institute of Physics
0883185172 9780883185179
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Book Details
Edition Notes
Includes bibliographical references and author index.
Source: Journal of vacuum science & technology, B, v.5, no.1, Jan-Feb. 1987, p.37-456
1:SERIALS Journal of vacuum science & technology
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