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Last edited by MARC Bot
November 29, 2023 | History
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Derrick C. Mancini

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  • Cover of: Synchrotron radiation technology: spectroscopic studies of its application to lithography and deposition, and the evaluation, modeling, and design of beamline instrumentation

    First published in 1994 1 edition in 1 language
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Subjects
Chemical vapor deposition, Synchrotron radiation, X-ray lithography

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ID Numbers

  • OLID: OL13367838A

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November 29, 2023 Created by MARC Bot import new book