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Last edited by Open Library Bot
April 28, 2010 | History

Pvd for Microelectronics 1 edition

Cover of: Pvd for Microelectronics | Ronald A. Powell

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Pvd for Microelectronics
Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
1st edition

Published November 15, 1998 by Academic Press .
Written in English.

First Sentence

The physical process tat we now call sputtering was first reported in 1852 by Sir William Robert Grove [1.1], who described the effect as "cathodic disintegration."

The Physical Object

Format
Hardcover
Number of pages
419
Dimensions
9 x 5.9 x 1.2 inches
Weight
1.8 pounds

ID Numbers

Open Library
OL9823170M
ISBN 10
012533026X
ISBN 13
9780125330268
Library Thing
8249951
Goodreads
1767002

History Created December 11, 2009 · 2 revisions Download catalog record: RDF / JSON

April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 11, 2009 Created by WorkBot add works page