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Last edited by Open Library Bot
December 5, 2010 | History

Book of SEMI standards, 1980 1 edition

Book of SEMI standards, 1980
Semiconductor Equipment and Ma ...

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Book of SEMI standards, 1980.

Published 1980 by Semiconductor Equipment and Materials Institute in Mt. View, CA .
Written in English.

Table of Contents

v. 1. Chemicals, equipment, materials, packages, photomask.
v. 2. Test methods.

Edition Notes

Includes bibliographical references.

Classifications

Dewey Decimal Class
621.3815/2/0218
Library of Congress
TK7871.85 .S46 1980

The Physical Object

Pagination
2 v. :

ID Numbers

Open Library
OL4136264M
LC Control Number
80114183

History Created December 10, 2009 · 2 revisions
Download catalog record: RDF / JSON

December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page