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Last edited by Open Library Bot
December 5, 2010 | History

Book of SEMI standards, 1980 1 edition

Book of SEMI standards, 1980
Semiconductor Equipment and Ma ...


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Book of SEMI standards, 1980.

Published 1980 by Semiconductor Equipment and Materials Institute in Mt. View, CA .
Written in English.

Table of Contents

v. 1. Chemicals, equipment, materials, packages, photomask.
v. 2. Test methods.

Edition Notes

Includes bibliographical references.


Dewey Decimal Class
Library of Congress
TK7871.85 .S46 1980

The Physical Object

2 v. :

ID Numbers

Open Library
LC Control Number

History Created December 10, 2009 · 2 revisions Download catalog record: RDF / JSON

December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page