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December 5, 2010 | History

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents 1 edition

Cover of: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents | European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th 1999 Munich, Germany)

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16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
15-16 November 1999, Munich, Germany
Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany).

Published 2000 by SPIE in Bellingham, Wash .
Written in English.

Edition Notes

Includes bibliographical references and index.
At head of title: Proceedings.

Series
SPIE proceedings series ;, v. 3996, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 3996.
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7872.M3 E97 1999

The Physical Object

Pagination
xii, 252 p. :
Number of pages
252

ID Numbers

Open Library
OL3963641M
ISBN 10
0819436143
LC Control Number
2001267976
OCLC/WorldCat
43620265
Goodreads
2052860

History Created December 10, 2009 · 3 revisions Download catalog record: RDF / JSON

December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page