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Last edited by Open Library Bot
December 3, 2010 | History

16th European Conference EMC on Mask Technology for Integrated Circuits and Microcomponents '99 1 edition

16th European Conference EMC on Mask Technology for Integrated Circuit ...
European Conference on Mask Te ...

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16th European Conference EMC on Mask Technology for Integrated Circuits and Microcomponents '99
conference chairperson: Uwe F.W. Behringer ; organizer: VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) in cooperation with Semiconductor Equipment and Materials International, Europe (SEMI-Europe), SPIE ... [et al.].

Published 1999 by VDE Verlag in Berlin .
Written in English.

Edition Notes

"Lectures held at the GMM-Conference November 15-16, 1999 in Munich, Germany.

Includes bibliographical references.

Series
GMM-Fachbericht -- 30
Genre
Congresses.

Classifications

Dewey Decimal Class
621.3815
Library of Congress
TK7872.M3 E87 1999b

The Physical Object

Pagination
227 p. :
Number of pages
227

ID Numbers

Open Library
OL19767747M
ISBN 10
3800725037

History

Download catalog record: RDF / JSON
December 3, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page