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Last edited by Open Library Bot
December 4, 2010 | History

Proceedings of the First International Symposium on Advanced Materials for ULSI 1 edition

Proceedings of the First International Symposium on Advanced Materials ...
International Symposium on Adv ...

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Proceedings of the First International Symposium on Advanced Materials for ULSI
edited by Martin Scott, Yoichi Akasaka, Rafael Reif.

Published 1988 by Electrochemical Society in Pennington, NJ (10 S. Main St., Pennington 08534-2896) .
Written in English.

Edition Notes

Includes bibliographies and index.
"[Sponsored by] Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions [of the Electrochemical Society]".

Series
Proceedings / Electrochemical Society ;, v. 88-19, Proceedings (Electrochemical Society) ;, v. 88-19.
Other Titles
Advanced materials for ULSI.

Classifications

Dewey Decimal Class
621.39/5
Library of Congress
TK7874 .I59238 1988

The Physical Object

Pagination
vi, 246 p. :
Number of pages
246

ID Numbers

Open Library
OL2069550M
LC Control Number
88082409

History Created December 10, 2009 · 2 revisions Download catalog record: RDF / JSON

December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page