Click here to skip to this page's main content.

New to the Open Library? — Learn how it works
Last edited by Open Library Bot
December 4, 2010 | History

Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology 1 edition

Proceedings of the Symposium on Process Physics and Modeling in Semico ...
Symposium on Process Physics a ...

Read

No readable version available.

Borrow

Try a WorldCat search?

Buy

Add an ISBN to link to booksellers

Lists

You could add Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology to a list if you log in.
Yikes! There's no description for this book yet. Can you help?
There is only 1 edition record, so we'll show it here...  •  Add edition?

Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology
edited by G.R. Srinivasan, J. Plummer, D. Antoniadis ; Electronics and Dielectrics and Insulation Divisions.

Published 1988 by Electrochemical Society in Pennington, NJ (10 S. Main St., Pennington 08534-2896) .
Written in English.

Edition Notes

Includes bibliographical references.
Spine title: Process physics and modeling in semiconductor technology.
Papers from a symposium held in San Diego, Calif., Oct. 19-24, 1986 and from the general session of the Electrochemical Society's 170th meeting.

Series
Proceedings / Electrochemical Society ;, v. 88-16, Proceedings (Electrochemical Society) ;, v. 88-16.
Other Titles
Process physics and modeling in semiconductor technology.

Classifications

Dewey Decimal Class
621.381/52/011
Library of Congress
TK7871.85 .S975 1986

The Physical Object

Pagination
vii, 303 p. :
Number of pages
303

ID Numbers

Open Library
OL2069449M
LC Control Number
88082250

History Created December 10, 2009 · 2 revisions
Download catalog record: RDF / JSON

December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page