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Last edited by Open Library Bot
December 4, 2010 | History

Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing 1 edition

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Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing
edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller.

Published 1988 by Electrochemical Society in Pennington, NJ (10 S. Main St., Pennington 08534-2896) .
Written in English.

Edition Notes

Includes bibliographies and indexes.
Spine title: Automated integrated circuits manufacturing.
Co-sponsored by the Electronics and Dielectrics and Insulation Divisions.

Series
Proceedings / Electrochemical Society ;, v. 88-13, Proceedings (Electrochemical Society) ;, v. 88-13.
Other Titles
Automated integrated circuits manufacturing.

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7874 .S884 1987

The Physical Object

Pagination
viii, 484 p. :
Number of pages
484

ID Numbers

Open Library
OL2068818M
LC Control Number
88081197

History Created December 10, 2009 · 2 revisions Download catalog record: RDF / JSON

December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page