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Ion implantation and plasma assisted processes
Conference on Ion Implantation ...

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Ion implantation and plasma assisted processes
proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988
edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International.

Published 1988 by ASM International in Metals Park, Ohio .
Written in English.

Edition Notes

Includes bibliographical references.

Classifications

Dewey Decimal Class
671.73
Library of Congress
TS695.25 .C66 1988

The Physical Object

Pagination
ix, 205 p. :
Number of pages
205

ID Numbers

Open Library
OL2067753M
ISBN 10
0871703300
LC Control Number
88071762
OCLC/WorldCat
19649434
Goodreads
2230962

History Created December 10, 2009 · 2 revisions
Download catalog record: RDF / JSON

December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page